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| ICP光源中射频功率测量装置的设计 | |
| 引用本文： | 王超,金星,石宝松,杜江.ICP光源中射频功率测量装置的设计[J].化工自动化及仪表,2010,37(5):54-56,59. |
| 作者姓名： | 王超 金星 石宝松 杜江 |
| 作者单位： | 1. 中国地质大学,武汉,机械与电子信息学院,武汉,430074;中国科学院长春光学精密机械与物理研究所,长春,130033 2. 中国地质大学,武汉,机械与电子信息学院,武汉,430074 3. 北京海光仪器公司,北京,100016 |
| 摘 要： | 阐述ICP光源中射频功率测量的意义,提出了测量范围为100~1 500 W,频率为27.12 MHz的功率测量装置的设计方案。详细分析了射频功率测量装置中的电路设计,包括采样互感器、功率合成电路、幅度相位分析电路和移相电路,并给出了判断ICP光源负载状态和性质的方法。在实验中,利用BIRD43型功率计和BIRD4304A型功率计对射频功率测量装置进行了参数校准。 |
| 关 键 词： | ICP光源 功率测量 射频 |
Design of RF Power Measurer of ICP Source |
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| WANG Chao,JIN Xing,SHI Bao-song,DU Jiang.Design of RF Power Measurer of ICP Source[J].Control and Instruments In Chemical Industry,2010,37(5):54-56,59. | |
| Authors: | WANG Chao JIN Xing SHI Bao-song DU Jiang |
| Affiliation: | 1.Faculty of Mechanical ＆ Electronic Information,China University of Geosciences,Wuhan 430074,China;2.Changchun Institute of Optics,Chinese Academy of Sciences,Changchun 130033,China;3.Beijing HaiGuang Instrument Co.Ltd,Beijing 100016,China) |
| Abstract: | A power measurer of inductively coupled plasma source was designed with measurement range of 100～1 500 Watt at 27.12 MHz frequency point.A method of judgment the load impedance characteristic of ICP source was given.The circuit of power measurer was analyzed,including sample transformer,power combiner,phase and gain detector,phase shift circuit.The power measurer was calibrated by BIRD43 and BIRD4304A RF power meter in experiments. |
| Keywords: | ICP source power measurement radio frequency |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |