光栅式宏/微应变传感器的设计

为满足桥梁及深海设备对毫米级测量范围和纳米级测量分辨力的应变测量要求，设计了一种基于光栅莫尔条纹测量原理的宏/微应变传感器。该传感器由上下两个滑块构成，滑块之间不设置导向机构，而是由弹簧片连接，以避免被测件的横向形变对传感器上下滑块导向机构的影响并由此影响到传感器的安装条件。考虑到弹簧片能够对传感器支撑结构产生附加形变，对支撑结构的形变进行了理论计算和有限元仿真。理论分析和实验结果表明，在-2~2mm形变测量范围内，传感器的测量分辨力小于5nm，而由支撑结构产生的最大附加形变小于20nm。

Design on Macro/Micro Strain Sensor Based on Grating

To meet the requirements of millimeter range and nanometer resolution of strain measurement for bridges and deep-sea equipment, a novel macro/micro strain sensor based on grating moiré fringe was designed. The sensor consisted of two sliders connected face to face by spring instead of guide connection so as to prevent the transverse deformation of measured object from sensor mechanism and installation condition. To analyze the additional deformation of support mechanism of sensor caused by spring force, the theoretical calculation and finite element simulation were well conducted. The theoretical analysis and experimental results show that, in the ±2mm range, the measurement resolution of sensor is less than 5nm and the maximum additional deformation aroused by support mechanism is less than 20nm.