ZrO2-SiO2薄膜对离子交换增强玻璃的光学和力学性能影响

采用溶胶-凝胶法在玻璃表面制备出ZrO₂-SiO₂薄膜, 然后通过离子交换形成镀膜增强玻璃, 研究了薄膜组成对离子交换增强玻璃的力学和光学性能的影响。利用紫外可见分光光度计、激光椭偏仪、纳米压痕、三点抗弯和能谱(EDX)分析了薄膜结构及性能。结果表明: 所有薄膜均连续均匀, 纯ZrO₂薄膜为四方相结构, 含Si薄膜为无定形结构; 薄膜具有较高弹性恢复率(>60%)以及H/E比(>0.1), 有利于强度增强; 随Si含量增加, 可见光透过率增大, 但表面硬度和杨氏模量随之降低; 0.5ZrO₂-0.5SiO₂薄膜综合性能最佳: 表面硬度为18 GPa, 抗弯强度为393 MPa, 厚度~45 nm时可见光透过率大于85%。

Mechanical and Optical Properties of Ion-exchange Strengthened Glass Coated with Sol-Gel Derived ZrO2-SiO2 Film

ZrO₂-SiO₂ films of different SiO₂ content were deposited on soda-lime glass substrates through a Sol-Gel process, which was followed by an ion-exchange strengthening process. Phase presents, surface morphology and ion-exchange depth were determined by X-ray diffractometer, scanning electron microscope and energy dispersive spectrometer analysis, respectively. The mechanical and optical properties of coated glass were studied. Homogeneous, continuous and dense films are obtained. Pure ZrO₂ film belongs to tetragonal structure, while other films with SiO₂ have an amorphous structure. ZrO₂-SiO₂ films with high ratio (H/E≥0.1) and elastic recovery (We≥60%) were thought to be favourable bending strength. Light transmittance increased, while hardness and Young’s modulus decreased with the increasing SiO₂ content in films. Typically, chemical strengthened 0.5ZrO₂-0.5SiO₂ film coated glass exhibited high bending strength of 393 MPa and high hardness of 18 GPa, and a negligible optical loss in visible region for thin thickness (~45 nm).