硬脆材料微磨削延性域复合临界条件建模及试验研究

分析硬脆材料微磨削表面形成机理并建立了微磨削槽磨未变形切屑厚度hm数学模型，引入微尺度效应系数Md、延性域系数与延-脆性域系数ζ0与ζ1，针对硬脆材料特性提出微磨削延性域，延-脆性域复合临界条件模型。基于精密微磨削机床进行钠钙玻璃与单晶硅这两种典型材料的微尺度槽磨磨削试验，通过对试验结果分析得出两种材料微磨削表面裂纹变化规律。基于实际试验数据结果对提出的硬脆材料微磨削复合临界条件模型进行验证，证明了所提出模型的科学性。分别给出钠钙玻璃与单晶硅的延性域与延-脆性域微磨削加工参数a0与a1，为硬脆材料微磨削延性域临界磨削条件研究提供了理论参考与试验依据。

Modeling and Experimental Study of Complex Critical Condition for Ductile-regime Micro-grinding of Hard Brittle Material

Surface formation mechanism of hard brittle material in micro-grinding is analyzed. The mathematical model of undeformed chip thickness hm in slot micro-grinding is built. A model to describe complex critical condition of ductile-regime in micro-grinding of hard brittle material is proposed considering size effect factor Md and micro-grinding tool topography. Micro-grinding ductile-regime experiments on soda-lime glass and monocrystal silicon are designed and carried out. Influences of micro-grinding parameters to crack length are investigated based on analysis of experiment results. The model this paper proposes is also confirmed，ductile factorζ0 and ductile-brittle factorζ1 to soda-lime glass and monocrystal silicon are derived. Some finding would provide research theory and experimental reference to micro-grinding.