| 不同基底上SiO2薄膜的显微结构和力学性能 |
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| 引用本文： | 王 河,贺洪波,张伟丽. 不同基底上SiO2薄膜的显微结构和力学性能[J]. 无机材料学报, 2013, 28(6): 653-658. DOI: 10.3724/SP.J.1077.2013.12461 |
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| 作者姓名： | 王 河 贺洪波 张伟丽 |
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| 作者单位： | (1. 中国科学院 上海光学精密机械研究所, 中国科学院强激光材料重点实验室, 上海201800; 2. 中国科学院大学北京100039) |
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| 摘 要： | 用电子束蒸发技术在K9玻璃及两种不同取向的钇铝石榴石(Y3Al5O12, 简称YAG)晶体上沉积了SiO2薄膜, 采用X射线衍射仪和纳米划痕仪对薄膜显微结构和力学性能进行了研究。实验结果表明: 薄膜在K9 、YAG(100) 和YAG(111)基底上分别呈现非晶态和多晶态; 沉积在不同基底上的薄膜的弹性模量并无明显差异; SiO2薄膜在K9和YAG基底上呈现不同的划痕破坏模式, 并且YAG晶体上薄膜的粘附失效临界附着力远远小于SiO2薄膜与K9基底的附着力。本文从薄膜的结构和弹性模量两方面分析解释了不同基底上薄膜的力学行为。
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| 关 键 词： | SiO2薄膜 显微结构 弹性模量 附着力 K9 YAG |
| 收稿时间： | 2012-07-26 |
| 修稿时间： | 2012-09-13 |
Substrate Effects on the Microstructure and Mechanical Properties of SiO2 Thin Films |
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| WANG He,HE Hong-Bo,ZHANG Wei-Li. Substrate Effects on the Microstructure and Mechanical Properties of SiO2 Thin Films[J]. Journal of Inorganic Materials, 2013, 28(6): 653-658. DOI: 10.3724/SP.J.1077.2013.12461 |
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| Authors: | WANG He HE Hong-Bo ZHANG Wei-Li |
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| Affiliation: | (1. Key Lab. of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China; 2. University of Chinese Academy of Sciences, Beijing 100039, China) |
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| Abstract: | The SiO2 films deposited respectively on K9 and two different orientations of Y3Al5O12 (YAG) crystals were manufactured by electron beam technology. X-ray diffraction (XRD) and nano-scratch tests were used to demonstrate the microstructures and mechanical properties of films. The crystal orientation of SiO2 thin films on K9 is noncrystalline structure and the other two, YAG (100) and YAG (111), are polycrystalline structures. The Young modulus of all films are similar. The nano-scratch tests show that the damage mechanisms of SiO2 thin films on K9 and YAG are different. The adhesive forces of the films on YAG (100) and YAG (111) are much less than homologous film on K9. The microstructures of the films and the divergences of the elastic modulus between films and substrates are taken to explain the different mechanical behaviors of the films on three substrates. |
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| Keywords: | SiO2 film microstructure modulus adhesive force K9 YAG |
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