Differential Pressure/Pressure Transmitters Applied with Semiconductor Sensors |
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Authors: | Matsuoka Yoshitaka Yamamoto Yoshimi Shimazoe Michitaka Yamada Kazuji |
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Affiliation: | Naka Works, Hitachi, Ltd., Ibaraki, 312 Japan.; |
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Abstract: | The optimum design for silicon diaphragm-type pressure sensors and that for a sensing body of the transmitters have been considered. Three types of sensors, which have different section shapes, have been developed for measuring wide-range pressure with high sensitivity and good linearity. The transmitters of the range from 0-100 Pa up to 0-50 MPa with an accuracy of 0.2 percent have been developed. For a differential pressure transmitter a three-metal diaphragm structure has been devised to protect the sensor from an overpressure. The characteristics of the transmitters are high accuracy, high reliability, and long-term stability. |
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