| 气体传感器的集成化研究状况 |
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| 引用本文： | 牛蒙年,丁辛芳.气体传感器的集成化研究状况[J].传感器与微系统,1994(3):1-6. |
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| 作者姓名： | 牛蒙年 丁辛芳 |
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| 作者单位： | 东南大学
(牛蒙年，丁辛芳)，东南大学(童勤义) |
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| 摘 要： | 集成技术在未来传感器的发展中起重要作用。综述了与集成工艺兼容的气体传感器的研究状况,包括半导体场效应型、晶体管型、薄膜型、微量热计型和声表面波(SAW)型气体传感器。
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| 关 键 词： | 集成技术 气体传感器 场效应结构 晶体管 薄膜结构 微量热计 声表面波器件 |
The State -of-arts of Integrated Gas Sensors |
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| Niu Mengnian Ding Xinfang Tong Qinyi.The State -of-arts of Integrated Gas Sensors[J].Transducer and Microsystem Technology,1994(3):1-6. |
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| Authors: | Niu Mengnian Ding Xinfang Tong Qinyi |
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| Affiliation: | Southeast University |
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| Abstract: | Integrated circuit(IC) technology plays an important role in manufacturing sensors in the future. The state-of-arts of gas sensors which are compatible with silicon IC technology are described, including semiconductor fefld-effect structure, transistor, thin-film stricture, microcalorimeter and surface acoustic wave(SAW) devices. |
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| Keywords: | IC technology Gas sensor Field-effect structture Transistor Thin-film structure Microcalorimeter SAW device |
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