Density, stress, hardness and reduced Young's modulus of W-C:H coatings |
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Authors: | BR Pujada GCAM Janssen |
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Affiliation: | a Netherlands Institute for Metals Research, Mekelweg 2, 2600 GA Delft, The Netherlands b Department of Materials Science and Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands |
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Abstract: | Density, hardness and compressive stress of tungsten contained in an amorphous-hydrogenated-carbon matrix (W-C:H) have been studied as a function of composition and bias voltage. W-C:H coatings were deposited by reactive sputter deposition from a tungsten-carbide (WC) target on silicon substrate in an argon-acetylene plasma. W-C:H coatings obtained at different acetylene flow rates and substrate bias voltages, were characterized by scanning electron microscopy, X-ray diffraction, nanoindentation and substrate curvature method. It has been observed that compressive stress, hardness and reduced Young's modulus decrease when the acetylene flow is increased from 0 to 10 sccm. Also, compressive stress and hardness increases with the substrate bias voltage. In particular, for W-C:H coatings obtained at 5 sccm of acetylene flow, the compressive stress and hardness increase from − 1.6 GPa to − 3.2 GPa and from 19 GPa to 24 GPa, respectively, when increasing the substrate bias from 0 to 200 V. The variation of the internal stress, hardness and density of the coatings is discussed in terms of composition and structure of the W-C:H coatings. |
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Keywords: | Sputter deposition Diamond-like carbon coatings Compressive stress |
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