Ozone Generation in Air by a DC-Excited Multi-Pin-to-Plane Plasma Source

In the fields of material processing and environmental technology, atmospheric pressure non-thermal plasmas embrace a broad range of applications. Ozone generation is one of them. This paper discusses a DC-excited atmospheric pressure glow discharge in a multi-pin-to-plane electrode configuration for the production of ozone in air. The influence of discharge current, temperature, flow rate and air humidity is investigated. A simple model is proposed to predict the experimental results for the ozone production and ozone concentrations.