基于体硅工艺的集成式定位平台特性研究

针对纳米定位平台的构型和定位精度问题，采用体硅加工技术成功地研制出一种基于单晶硅并带有位移检测功能的新型二自由度微型定位平台，定位平台采用侧向平动静电梳齿驱动。作者利用力电耦合原理结合能量守恒原理分析了静电致动器的致动机理，对定位平台的失效模型、静态特性以及动态特性进行详细地建模分析，证明了静电梳齿力电耦合导致的侧壁不稳定以及驱动器的最大稳定输出位移，给出了平台稳定工作条件下同梳齿间隙、梳齿初始交错长度已经复合柔性支撑梁的弹性刚度比之间的关系。动态分析考虑的空气阻尼对平台的影响，给出了平台最大运行速度、位移已经动态条件下的临界驱动电压。

Characteristic research of the integrating positioning XY-Stage based on bulk machining

In order to realize the miniaturized nano-positioning stage, a novel 2-DOF single crystal silicon (SCS) nano-positioning micro x-y stage with the function of displacement detection was successfully developed using silicon bulk machining, electrostatics comb actuator is used to drive x-y stage. The theory of electromechanical coupling and energy conservation are used to analyze electrostatic actuated mechanism, x-y stage static characteristic, and x-y stage dynamic characteristic. Some failure modes of x-y stage are also presented and the electromechanical side instability and the stable travel range of comb-drive actuators are investigated. The stable travel range depends on the finger gap spacing, the initial finger overlap, and the spring stiffness ratio of the compliant suspension. Additionally, the effect of the air damping is taken into account during the analyzing the x-y stage dynamic characteristic, under which the maximum velocity and stable travel range are proposed.