非球面补偿板三维面形检测方法的研究

本文对准直激光束检测非球面方法进行了研究。它不用接触被检件表面,同时也无须处理干涉条纹。测量时只要保证激光细束保持一致的入射方向扫描被检表面,用CCD光电探测器检出面形的斜率变化,而后在扫描范围内积分便能获得面形高度。本文以测量光学系统中用于波面补偿目的的旋转对称镜面为例对测量系统进行分析。该系统不仅可以进行一维测量,通过转台旋转亦可进行二维测量,通过面形重构获得三维的被测体面形。给出了三维面形重构方法,并编制数据处理软件,可以把测量数据处理成高度曲线或三维面形。

Investigation on 3-D Profile Measurement of Aspheric Compensator

A method of aspheric surface measurement by laser autocollimation is discussed in this paper, which is a non-contacting method but no fringes to be processed as interferometers need to do. Using CCD to detecting the output of surface slope, then the slope values obtained are integrated with respect to distance to obtain profile height. The measurement system is carefully analyzed in this paper by which rotational symmertrical mirrors used as a wavefront compensator in optical system can be surveyed along their meridians. Two demensional surveying can be carried out by rotating the mirror around its symmetrical axis in order to obtain the information data about the three dimensional profile of the test mirror. A reliable software to process the source data and to reconstruct the 3D profile of the test mirror is completed which can output height curve or surface profile and can also achieve other functions.