| 薄膜应力测定研究现状 |
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| 引用本文： | 张文,曹兴进. 薄膜应力测定研究现状[J]. 现代制造工程, 2005, 0(4): 127-130 |
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| 作者姓名： | 张文 曹兴进 |
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| 作者单位： | 重庆大学机械传动国家重点实验室,重庆,400044;重庆大学机械传动国家重点实验室,重庆,400044 |
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| 基金项目： | 重庆大学机械学院基础研究项目资助 |
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| 摘 要： | 简介薄膜应力的产生原因,根据薄膜应力测定方法研究的现状,对一些主要测定方法的基本原理及各自的特点进行了综述。
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| 关 键 词： | 薄膜 应力 测定 原理 |
| 文章编号： | 1671-3133(2005)04-0127-04 |
| 修稿时间： | 2004-12-10 |
Current status of research on measurement of the stress in thin film |
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| Zhang Wen,Cao Xingjin. Current status of research on measurement of the stress in thin film[J]. Modern Manufacturing Engineering, 2005, 0(4): 127-130 |
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| Authors: | Zhang Wen Cao Xingjin |
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| Abstract: | The cause of the stress in thin film is introduced simply. And the primary theories and characteristics of some important measurement methods of stress in thin films were summarized according to the current status of the improvement of the methods. |
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| Keywords: | Thin film Stress Measurement Theory |
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