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Alpha particle radiation effects in RF MEMS capacitive switches |
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| Authors: | J Ruan E Papandreou M Lamhamdi M Koutsoureli F Coccetti P Pons G Papaioannou R Plana |
| Affiliation: | 1. Istituto per la Microelettronica e Microsistemi, IMM-CNR, Strada VIII 5, 95121 Catania, Italy;2. Dipartimento di Scienze Chimiche, Università di Catania, INSTM — UdR Catania, Viale A. Doria 6, 95125 Catania, Italy;3. Dipartimento di Ingegneria Elettronica, Università di Catania, Viale A. Doria 6, 95125 Catania, Italy |
| Abstract: | The paper investigates the effect of 5 MeV alpha particle irradiation in RF MEMS capacitive switches with silicon nitride dielectric film. The investigation included MIM capacitors in order to obtain a better insight on the irradiation introduced defects in the dielectric film. The assessment employed the thermally stimulated depolarization currents method for MIM capacitors and the capacitance–voltage characteristic for MEMS switches. Asymmetric charging was monitored in MIM capacitors due different contact electrodes and injected charge interactions. |
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