|
|||||
|
|
Temperature stability of a piezoresistive MEMS resonator including self-heating |
|
| Authors: | S Bendida JJ Koning JJM Bontemps JTM van Beek D Wu MAJ van Gils S Nath |
| Affiliation: | 1. Department of Electrophysics, National Chiao Tung University, Hsinchu, Taiwan;2. Department of Physics, National Sun Yat-sen University, 70 Lien-hai Road, Kaohsiung 80424, Taiwan;3. Department of Photonics, National Sun Yat-Sen University, 70 Lien-hai Road, Kaohsiung 80424, Taiwan;4. HannStar Display Corp. New Technology Development Department, Taiwan |
| Abstract: | Temperature stability of a piezoresistive 1.5 μm thin SOI resonator at 74 MHz is presented. As compared to capacitive resonators the self-heating due to the bias current causes a further decrease of the resonator frequency, in addition to the well-known dependency on ambient temperature. The interpretation of the resonance frequency as a device temperature is not obvious anymore under self-heating due to the inhomogeneous temperature distribution. |
| Keywords: | |
| 本文献已被 ScienceDirect 等数据库收录！ | |