Cost‐effective Atomic Layer Deposition Synthesis of Pt Nanotube Arrays: Application for High Performance Supercapacitor |
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Authors: | Liaoyong Wen Yan Mi Chengliang Wang Yaoguo Fang Fabian Grote Huaping Zhao Min Zhou Yong Lei |
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Affiliation: | Institut für Physik & IMN MacroNano* (ZIK), Technische Universit?t Ilmenau, , Ilmenau, Germany |
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Abstract: | Due to the unique advantages of Pt, it plays an important role in fuel cells and microelectronics. Considering the fact that Pt is an expensive metal, a major challenging point nowadays is how to realize efficient utilization of Pt. In this paper, a cost‐effective atomic layer deposition (ALD) process with a low N2 filling step is introduced for realizing well‐defined Pt nanotube arrays in anodic alumina nano‐porous templates. Compared to the conventional ALD growth of Pt, much fewer ALD cycles and a shorter precursor pulsing time are required, which originates from the low N2 filling step. To achieve similar Pt nanotubes, about half cycles and 10% Pt precursor pulsing time is needed using our ALD process. Meanwhile, the Pt nanotube array is explored as a current collector for supercapacitors based on core/shell Pt/MnO2 nanotubes. This nanotube‐based electrode exhibits high gravimetric and areal specific capacitance (810 Fg?1 and 75 mF cm?2 at a scan rate of 5 mV s?1) as well as an excellent rate capability (68% capacitance retention from 2 to 100 Ag?1). Additionally, a negligible capacitance loss is observed after 8000 cycles of random charging‐discharging from 2 to 100 Ag?1. |
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Keywords: | Pt ALD pre‐patterned alumina template Pt nanotube arrays core/shell Pt/MnO2 supercapacitor |
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