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基于声表面波的微操控技术研究进展
引用本文:蒋 鹏,孟 龙,蔡飞燕,刘 新,郑海荣. 基于声表面波的微操控技术研究进展[J]. 集成技术, 2013, 2(5): 42-47
作者姓名:蒋 鹏  孟 龙  蔡飞燕  刘 新  郑海荣
作者单位:中国科学院深圳先进技术研究院 深圳 518055;哈尔滨工业大学深圳研究院 深圳 518055);中国科学院深圳先进技术研究院 深圳 518055;中国科学院深圳先进技术研究院 深圳 518055;中国科学院深圳先进技术研究院 深圳 518055;中国科学院深圳先进技术研究院 深圳 518055
基金项目:深圳市知识创新计划基础研究项目(JCYJ20120615124706404)
摘    要:微操控技术是指精确控制微纳米颗粒的运动状态,如对细胞、生物大分子、纳米药物等进行捕获、筛选、移动、分类,其在生物医学、化学分析、材料科学等领域有着重要应用,近年来引起了各国学者的极大关注。声操控是利用声波操控微粒,具有非接触、穿透性较好、无需对微粒进行化学生物修饰等优点。近年来随着微机电系统(MEMS)技术和微流控芯片技术的迅速发展,基于声表面波(SAW)的微操控技术受到广泛关注和研究。声表面波芯片因其具有频率较高、能量局域、易于集成等特点,能够基于显微技术直接观察细胞、微泡等生物微粒的操纵状态,是一个良好的微操控工具。文章主要介绍基于声表面波的声流、声辐射力效应操控微粒的最新研究进展以及声操控的发展趋势。

关 键 词:微尺度;声操控;声表面波;声子晶体

Progress in Micro-Scale Acoustic Manipulation Based on Surface Acoustic Wave
JIANG Peng,MENG Long,CAI Fei-yan,LIU Xin and ZHENG Hai-rong. Progress in Micro-Scale Acoustic Manipulation Based on Surface Acoustic Wave[J]. , 2013, 2(5): 42-47
Authors:JIANG Peng  MENG Long  CAI Fei-yan  LIU Xin  ZHENG Hai-rong
Abstract:Micro-scale manipulation is a technology of manipulating micro/nanoparticles precisely including trapping,filtering, moving and sorting particles like cells, biomacromolecules and nano drugs, with a vast array of potential uses inbiomedicine, chemical analysis, materials science and other fields. By applying acoustic waves, acoustic manipulation hassome advantages including non-contact, penetrability and versatility, no biochemical decorations to particles. In recent years,the manipulation of particles based on surface acoustic wave (SAW) has attracted wide attention with the development ofMEMS technology and microfluidics science. Due to the advantages such as high frequency, localization of the energy andeasy integration with other on-chip units, the microfluidic chip is an excellent tool to observe the manipulation of cells,microbubbles and other bioparticles. In this paper, recent advancements in acoustic manipulation using acoustic steaming andradiation force were discussed. In addition, some perspectives on the future development of this dynamic field were proposedas well.
Keywords:micro-scale   acoustic manipulation   surface acoustic wave   phononic crystals
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