| 定向金刚石膜的合成及机理探索 |
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| 引用本文： | 唐璧玉,杨国伟,任志昂,蔡孟秋.定向金刚石膜的合成及机理探索[J].半导体光电,2000,21(2):150-152. |
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| 作者姓名： | 唐璧玉 杨国伟 任志昂 蔡孟秋 |
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| 作者单位： | 湘潭大学,物理系,湘潭,411105 |
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| 基金项目： | 湖南省计委资助项目，湖南省科技厅科研项目 |
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| 摘 要： | 采用热丝化学汽相淀积 (CVD) ,未用别的辅助措施 ,合成了 (10 0 )晶面的金刚石膜。结合CVD金刚石成核的微观过程 ,探讨了定向金刚石膜的形成机理。发现和研究了表面扩散对CVD金刚石成核的重要影响。
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| 关 键 词： | 化学汽相沉积 定向金刚石膜 无定形碳 表面扩散 |
| 修稿时间： | 1999-06-10 |
Synthesis of Oriented Diamond Films and Its Mechanism |
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| TANG Bi-yu,YANG Guo-wei,REN Zhi-ang,CAI Men-qiu.Synthesis of Oriented Diamond Films and Its Mechanism[J].Semiconductor Optoelectronics,2000,21(2):150-152. |
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| Authors: | TANG Bi-yu YANG Guo-wei REN Zhi-ang CAI Men-qiu |
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| Abstract: | Oriented (100) diamond film is deposited on silicon substrate by adjusting process parameters without use of other assisted measures in hot-filament CVD system.Mechanism of its synthesis is discussed based on microprocess of the nucleation of CVD diamond.A great impact of surface diffusion on CVD diamond nucleation is discovered and investigated . |
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| Keywords: | CVD oriented diamond films amorphous carbon surface diffusion |
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