| 软X射线多层膜反射镜的设计、制备与检测 |
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| 引用本文： | 曹健林. 软X射线多层膜反射镜的设计、制备与检测[J]. 光学精密工程, 1990, 0(5): 33-40 |
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| 作者姓名： | 曹健林 |
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| 摘 要： | 本文提出一种图像直观、结果可靠的软X线多层膜设计方法,讨论了与软X射线多层膜制备有关的基板选择,膜厚控制等工艺问题。给出Mo/Si软X射线多层膜小角度衍射及171Å、231Å及256Å处软X射线反射率的测试结果,并对软X射线多层膜工作做了展望。
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Design Fabrication and Test for Soft X-ray Multilayered Mirrors |
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| Cao Jianlin. Design Fabrication and Test for Soft X-ray Multilayered Mirrors[J]. Optics and Precision Engineering, 1990, 0(5): 33-40 |
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| Authors: | Cao Jianlin |
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| Abstract: | This paper presents a simple and efficient method for the design of soft X-ray multilayered coating and discusses the relevant techneques such as substrate preparation and film thickness control etc. X-ray small angle diffraction measurement results and soft X-ray reflectance measurement results at 171Å, 231Å and 256Å were given in detail. Finally the future development for soft X-ray multilayered coatings was commented. |
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