| 磁控反应溅射MoS2/Ti/C复合薄膜的组织结构及摩擦磨损性能 |
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| 引用本文： | 李倩倩,尹桂林,郑慈航,余震,何丹农.磁控反应溅射MoS2/Ti/C复合薄膜的组织结构及摩擦磨损性能[J].材料保护,2011,44(3):14-16. |
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| 作者姓名： | 李倩倩 尹桂林 郑慈航 余震 何丹农 |
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| 作者单位： | 李倩倩,何丹农,LI Qian-qian,HE Dan-nong(上海交通大学材料科学与工程学院,上海,200240;纳米技术及应用国家工程研究中心,上海,200241);尹桂林,YIN Gui-lin(纳米技术及应用国家工程研究中心,上海,200241);郑慈航,余震,ZHENG Ci-hang,YU Zhen(上海交通大学材料科学与工程学院,上海,200240) |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 为了提高MoS2薄膜在室温潮湿大气条件下的摩擦磨损性能,通过磁控反应溅射制备了MoS2/Ti/C复合薄膜.采用能谱仪(EDS)、X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)对薄膜的成分、相组成和形貌进行表征,采用纳米压痕仪测试薄膜的结合力、纳米压痕硬度,采用多功能微摩擦磨损试验机测试薄膜的摩擦系数,并采用...
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| 关 键 词： | 磁控反应溅射 MoS2/Ti/C薄膜 MoS2薄膜 组织结构 摩擦磨损性能 |
Microstructure and Tribological Properties of MoS_2/Ti/C Composite Film Deposited by Magnetron Reaction-Sputtering |
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| LI Qian-qian,YIN Gui-lin,ZHENG Ci-hang,YU Zhen,HE Dan-nong.Microstructure and Tribological Properties of MoS_2/Ti/C Composite Film Deposited by Magnetron Reaction-Sputtering[J].Journal of Materials Protection,2011,44(3):14-16. |
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| Authors: | LI Qian-qian YIN Gui-lin ZHENG Ci-hang YU Zhen HE Dan-nong |
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| Affiliation: | LI Qian-qian1,2,YIN Gui-lin2,ZHENG Ci-hang1,YU Zhen1,HE Dan-nong1,2(1.College of Materials Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China,2.National Engineering Research Center of Nanotechnology,Shanghai 200241,China) |
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| Abstract: | MoS2/Ti/C composite film was prepared by magnetron reaction-sputtering.The composition,phase structure and morphology of resultant composite film were analyzed by means of energy dispersive spectrometry,X-ray diffraction and field emission scanning electron microscopy.The adhesion to substrate and nano-indentation hardness of the composite film were measured using a nanoindenter.The friction coefficient of the composite film was evaluated using a multi-functional tribometer,and the worn surface morphology w... |
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| Keywords: | magnetron reaction-sputtering MoS2/Ti/C film MoS2 film microstructure tribological properties |
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