多层膜周期厚度的精确计算

布拉格修正公式可以用于计算基底是平面的软X射线多层膜周期厚度,但对于基底是曲面的多层膜,小角X射线衍射峰角度常常发生漂移,用该公式计算的周期厚度就与实际周期厚度不一致。分析了衍射峰角度位置漂移现象,对以布拉格公式为基础的多层膜周期厚度计算公式进行了修正,实验结果显示,利用修正公式获得的多层膜周期厚度比较接近多层膜实际周期厚度。

Precise Calculation of the Periodic-thickness for Multilayer

The amendatory Bragg formula may be used for calculating the periodic thickness of multlayers deposited on the plane substrate by small X-ray diffraction spectrum. However, the diffraction peak angle of multilayer deposited on the curved substrate will be different from that of multilayer fabricated on the plane substrates though they have the same periodic thickness. Thus, the calculated periodic thickness of the above multilayer with the Bragg formula is not well agreement with the real value of the multilayer. This paper gives an analysis of phenomenon of diffraction peak excursion, and gives a revised formula derived from the amendatory Bragg formula for accurately calculating the periodic thickness of multilayer deposited on any substrates. The experimental results show that the periodic thickness calculated with the formula is consistent with the practical periodic thickness.