| 陶瓷质电容式压力传感器的研制 |
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| 引用本文： | 李士忠,石汝军,王成礼,翟鹏.陶瓷质电容式压力传感器的研制[J].信息技术与信息化,1997(2). |
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| 作者姓名： | 李士忠 石汝军 王成礼 翟鹏 |
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| 作者单位： | 山东省硅酸盐研究设计院 |
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| 摘 要： | 本试验采用增韧陶瓷试制成功了一种陶瓷质的电容式压力传感器，由于采用干式设计（无填充液），及厚膜电路ＳＭＴ技术和ＰＦＭ信号传输技术，其外型尺寸、灵敏度、稳定性、抗干扰能力等均大幅度改善，特别是其耐腐蚀、易安装，因此具有极大的推广应用价值。
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| 关 键 词： | 增韧陶瓷，电容式，压力传感器 |
Development of Ceramic-based Capacitance-type Pressure-Sensing Probe |
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| Li Shizhong Shi rujun Wang Chengli Zhai Peng.Development of Ceramic-based Capacitance-type Pressure-Sensing Probe[J].Information Technology & Informatization,1997(2). |
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| Authors: | Li Shizhong Shi rujun Wang Chengli Zhai Peng |
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| Affiliation: | Li Shizhong Shi rujun Wang Chengli Zhai Peng |
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| Abstract: | ln the test, a ceramic-based capacitance-type pressure-sensing probe is successfully developed by the use of toughened ceramics. Becausse of adopting dry design (i . e. no filling solution) , thick film circuit SMT technology and PEM signaJ transfering technology, the product' s outer size, sensibility , stability and resistance to jamming have been improved greatly . Particularly, it has a good resistance to corrosion and is easy to be installed,so it is worthy to be spreaded and applied, |
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| Keywords: | Toughened ceramics Capacitance-type Pressure-sensing probe |
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