| Ba(Zr0.3Ti0.7)O3薄膜的结构及性能 |
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| 引用本文： | 高成,翟继卫,姚熹.Ba(Zr0.3Ti0.7)O3薄膜的结构及性能[J].硅酸盐学报,2006,34(8):946-950. |
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| 作者姓名： | 高成 翟继卫 姚熹 |
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| 作者单位： | 同济大学功能材料研究所,上海,200092 |
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| 基金项目： | 国家重点基础研究发展计划(973计划)
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上海市纳米科技与产业发展促进中心基金
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教育部跨世纪优秀人才培养计划 |
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| 摘 要： | 用溶胶-凝胶法分别在Pt/Ti/SiO2/Si和LaNiO3/Pt/Ti/SiO2/Si衬底上制备了锆钛酸钡Ba(Zr0.3Ti0.7)O3,BZT]薄膜.相结构及介电性能研究表明:衬底和薄膜厚度对BZT薄膜性能具有显著影响.制备在LaNiO3/Pt/Ti/SiO2/Si衬底上的BZT薄膜具有(100)面的择优取向,其介电常数及介电损耗则随着薄膜厚度的增加而降低.对制备在Pt/Ti/SiO2/Si衬底上的BZT薄膜,在薄膜厚度低于500nm时,其介电常数随薄膜厚度增加而增加,大于500nm时又有所减小.
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| 关 键 词： | 锆钛酸钡薄膜 介电性能 厚度 溶胶-凝胶法 |
| 文章编号： | 0454-5648(2006)08-0946-05 |
| 收稿时间： | 01 15 2006 12:00AM |
| 修稿时间： | 04 26 2006 12:00AM |
STRUCTURE AND PROPERTIES OF Ba(Zr0.3Ti0.7)O3 THIN FILMS |
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| GAO Cheng,ZHAI Jiwei,YAO Xi.STRUCTURE AND PROPERTIES OF Ba(Zr0.3Ti0.7)O3 THIN FILMS[J].Journal of The Chinese Ceramic Society,2006,34(8):946-950. |
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| Authors: | GAO Cheng ZHAI Jiwei YAO Xi |
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| Affiliation: | Functional Material Research Laboratory, Tongji University, Shanghai 200092, China |
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| Abstract: | Ba(Zr0.3Ti0.7)O3(BZT) thin films with different thicknesses were prepared by sol-gel processing on Pt/Ti/SiO2/Si and LaNiO3/Pt/Ti/SiO2/Si substrates.The study of the microstructure and dielectric properties indicated that the dielectric properties of thin films were greatly influenced by the choice of substrates and the thickness of the thin films.The thin films prepared on LaNiO3/Pt/Ti/SiO2/Si substrates had strong (100) preferred orientation,and with the increase of the thickness of thin films,their di-electric constant and loss tanget decreased.For the thin films on Pt/Ti/SiO2/Si substrates,the dielectric constant increased with the increase of the thin films' thickness up to 500 nm,while it decreased with a further increase of thickness above 500 nm. |
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| Keywords: | barium zirconate titanate thin films dielectric properties thickness sol-gel method |
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