| 高性能导电薄膜的制备 |
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| 引用本文： | 张树人,陈国良,郭太良.高性能导电薄膜的制备[J].真空,2007,44(3):24-27. |
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| 作者姓名： | 张树人 陈国良 郭太良 |
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| 作者单位： | 福州大学物理与通信工程学院,福建,福州,350002 |
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| 基金项目： | 国家高技术研究发展计划(863计划)平板显示重大专项项目 |
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| 摘 要： | 采用磁控溅射法在玻璃基底上制备了Cr-Cu-Al-Cr薄膜,用焊接法测试薄膜附着性能,用x射线衍射仪（XRD）、原子力显微镜（AFM）和台阶仪对薄膜进行表征,研究溅射过程中以及在高温大气环境下薄膜的防氧化方法,分析薄膜晶粒大小与电性能关系,制备出性能较好的导电膜。
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| 关 键 词： | 附着性 氧化 晶粒 电学性能 |
| 文章编号： | 1002-0322（2007）03-0024-04 |
| 修稿时间： | 2006-10-10 |
Preparation of high-performance conductive thin films |
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| ZHANG Shu-ren,CHEN Guo-liang,GUO tai-liang.Preparation of high-performance conductive thin films[J].Vacuum,2007,44(3):24-27. |
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| Authors: | ZHANG Shu-ren CHEN Guo-liang GUO tai-liang |
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| Affiliation: | Physics and Information Engineering College of Fuzhou University, Fuzhou 350002, China |
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| Abstract: | Cr-Cu-Al-Cr thin films were deposited on glass substrates by magnetron sputtering.The adhesion of the films was tested by welding method.The films were characterized by x-ray diffraction(XRD),atomic force microscopy(AFM)and surface profilometer to investigate the preparation of the thin film by way of improving the oxidation resistance in the magnetron sputtering process and high-temperature atmosphere in addition to discussing the relation between grain size and electrical properties. |
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| Keywords: | adhesion oxidation grain electrical properties |
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