Integrated UV-based photo microreactor-distillation technology toward process intensification of continuous ultra-high-purity electronic-grade silicon tetrachloride manufacture |
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Authors: | Ye Wan Wenhui Guo Jin Xiao Dazhou Yan Xiong Zhao Shuhu Guo Jianhua Liu Qifan Zhong Tao Yang Yu Zhao Xin Chang Xin Gao |
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Affiliation: | 1.School of Metallurgy and Environment, Central South University, Changsha 410083, China;2.China ENFI Engineering Co., Ltd., Beijing 100038, China;3.National Engineering Laboratory of Polysilicon Materials Preparation Technology, Luoyang 471023, China;4.National Engineering Laboratory of Efficient Utilization of Refractory Nonferrous Metal Resources, Central South University, Changsha 410083, China;5.School of Chemical Engineering and Technology, Tianjin University, Tianjin 300072, China |
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Abstract: | Ultra-high-purity silicon tetrachloride (SiCl4) is demanded as an electronic-grade chemical to meet the stringent requirements of the rapidly developing semiconductor industry. The high requirement for ultra-high-purity SiCl4 has created the need for a high-efficient process for reducing energy consumption as well as satisfying product quality. In this paper, a mass of production technology of ultra-high-purity SiCl4 was successfully developed through chlorination reaction in the ultraviolet (UV)-based photo microreactor coupled with the distillation process. The influences of key operational parameters, including temperature, pressure, UV wavelength and light intensity on the product quality, especially for hydrogen-containing impurities, were quantified by the infrared transmittance of Fourier transform infrared spectroscopy (FT-IR) at 2185 cm-1 and 2160 cm-1 indicating that characteristic vibrational modes of Si—H bonds, as well as the operating conditions of distillation were also investigated as key factors for metal impurities removing. The advanced intensification of SiCl4 manufactured by the integration of photo microreactor and distillation achieves the products with superior specifications higher than the standard commercial products. |
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