高频响精密位移直线电机及其控制的研究

介绍高频响精密位移直线电机的基本结构方案，探讨了用ＮｄＦｅＢ磁性材料来设计径向磁路气隙磁场的分析计算技术方法，以及精密位移直线电机的支承结构方案，提出了自寻优数字ＰＩＤ校正控制方法，并建立了相应的控制系统模型，经实验证明文中所提出的直线电机结构控制方案有利于获得较高的频响与精密位移精度，在精密位移误差补偿、微进给等方面有良好的应用前景。

RESEARCH ON LINEAR MOTOR AND ITS CONTROL FOR HIGH RESPONSE FREQUENCY AND PRECISION DISPLACEMENT

This paper puts forward a basic structure scheme of linear motor for high response frequency and precision displacement, and further discusses the analysis and computation technology of air gap field of radial magnetic circuit with material NdFeB and a supporting structure scheme for precise linear motor. A numerical PID correction control method which optimized by itself, and built its correspondence control system model is also mentioned. Through the experiments, it is proved that this structure of linear motor is convenient to get a high response frequency and displacement accuracy, and very useful in the field of error compensation of displacement and microfeed.