| MoS2-Zr复合薄膜的摩擦学性能研究 |
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| 引用本文： | 欧文敏,韦春贝,代明江,侯惠君,林松盛,邱万奇.MoS2-Zr复合薄膜的摩擦学性能研究[J].表面技术,2017,46(1):93-99. |
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| 作者姓名： | 欧文敏 韦春贝 代明江 侯惠君 林松盛 邱万奇 |
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| 作者单位： | 华南理工大学 材料科学与工程学院,广州 510640;广东省新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州 510651;广东省新材料研究所 现代材料表面工程技术国家工程实验室 广东省现代表面工程技术重点实验室,广州,510651;华南理工大学 材料科学与工程学院,广州,510640 |
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| 基金项目： | 广州市科技计划项目(201510010016),广东省科技计划项目(2013B091602002,2014B070706026,2013B061800053),广东省科学院平台建设项目(2016GDASPT-0206,2016GDASPT-0317)。 |
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| 摘 要： | 目的改善MoS_2薄膜的疏松结构,提高其硬度及摩擦磨损性能。方法采用离子源辅助磁控溅射技术在GCr15基体上沉积不同Zr含量的MoS_2-Zr复合薄膜,通过SEM分析薄膜的表面及截面形貌。采用EDS检测薄膜的成分,采用显微维氏硬度计测试薄膜的硬度,采用Rockwell-C硬度计进行压痕测试实验,采用球-盘式旋转摩擦磨损试验机评价薄膜的摩擦磨损性能。结果 MoS_2-Zr复合薄膜的致密程度和硬度随着Zr含量的增加而增大,其硬度值为300~500HV。复合薄膜与基体的结合力随着Zr含量的增加而增强,但当Zr含量过高时,结合力下降。含Zr原子数分数为15%的MoS_2-Zr复合薄膜具有最好的摩擦学性能,其平均摩擦系数为0.09,磨损率为9.33×10~7 mm~3·N~(–1)·m~(–1),耐磨寿命达5.25×105 r。结论 Zr的掺杂改善了纯MoS_2薄膜的疏松结构,提高了MoS_2薄膜的硬度和结合力,合适的Zr掺杂可以获得较低的摩擦系数和较长的耐磨寿命。
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| 关 键 词： | MoS2-Zr复合薄膜 磁控溅射 微观结构 硬度 结合力 摩擦系数 |
| 收稿时间： | 2016/7/20 0:00:00 |
| 修稿时间： | 2016/12/14 0:00:00 |
Tribological Properties of MoS2-Zr Composite Films |
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| OU Wen-min,WEI Chun-bei,DAI Ming-jiang,HOU Hui-jun,LIN Song-sheng and QIU Wan-qi.Tribological Properties of MoS2-Zr Composite Films[J].Surface Technology,2017,46(1):93-99. |
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| Authors: | OU Wen-min WEI Chun-bei DAI Ming-jiang HOU Hui-jun LIN Song-sheng and QIU Wan-qi |
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| Affiliation: | 1.School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China; 2.Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China,Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China,Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China,Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China,Guangdong Institute of New Materials, National Engineering Laboratory for Modern Materials Surface Engineering Technology, Key Lab of Guangdong for Modern Surface Engineering Technology, Guangzhou 510651, China and School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640, China |
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| Abstract: | The work aims to improve loose structure, hardness, friction and wear properties of MoS2 films. MoS2-Zr compo-site films with different Zr content were deposited on GCr15 substrate by ion assisted magnetron sputtering technology. Mor-phology of surface and cross section of films was analyzed by SEM; composition was determined by EDS; hardness by Micro Vickers tester; indentation test was performed by Rockwell-C hardness tester; friction and wear properties of the films were eva-luated by ball-disk rotating friction and wear tester. The compactness and hardness of MoS2-Zr composite films increased with the increase of Zr content with hardness value ranging from 300~500HV. The adhesion strength between composite film and substrate increased with the increase of Zr content and decreased in case of excessive Zr content. The MoS2-Zr composite films with 15 at.% Zr content showed the best tribological properties, their average friction coefficient was 0.09, wear rate 9.33×107 mm3·N–1·m–1and wear life 5.25×105 r. Loose structure, hardness and adhesion strength of MoS2-Zr composite films were improved. Lower friction coefficient and longer wearing life can be obtained provided with appropriate Zr doping content. |
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| Keywords: | MoS2-Zr composite films magnetron sputtering microstructure hardness adhesion coefficient of friction |
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