Large-area uniform dust-free plasma CVD

In the weak magnetic field perpendicular to the discharge electric field, both the electrons and positive ions are transported in the direction of E×B drift by the space charge electric field produced by the preceded electrons. As a result, radicals are generated uniformly outside of discharge space between the electrodes in the direction of E×B drift. On the other hand, negatively charged heavy particles such as dust particles can be removed from discharge space in the direction opposite to E×B drift of plasmas. The authors have studied the transport mechanisms of magnetized dusty plasmas and its applications for the large-area uniform a-Si:H thin film deposition in plasma CVD methods. This paper reviews the transport phenomena and the transport mechanisms of dust particles and the results of film preparation under particle-free process conditions.