| 西门子工艺制备多晶硅体系的热力学分析 |
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| 引用本文： | 彭耀东,覃攀,冉祎,李育亮,尚书勇,印永祥. 西门子工艺制备多晶硅体系的热力学分析[J]. 河南化工, 2012, 0(7): 31-34 |
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| 作者姓名： | 彭耀东 覃攀 冉祎 李育亮 尚书勇 印永祥 |
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| 作者单位： | 1. 四川大学化工学院,四川成都,610065
2. 宜宾学院化学与化工系,四川宜宾,644007 |
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| 摘 要： | 利用吉布斯自由能理论对西门子体系进行了热力学分析,梳理了体系中可能发生的系列化学反应。结果表明,多晶硅生产主反应为裂解反应而非还原,SiHCl3裂解生成SiCl2(g)和HCl(g),进而生成Si和SiCl4(g)。这不仅合理地解释了实际生产中副产大量四氯化硅等问题,而且为优化还原工艺提供了有价值的科学依据。
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| 关 键 词： | 多晶硅 西门子工艺 热力学分析 反应机理 |
Thermodynamic Qualitative Analysis of Advanced Siemens Process of Polysilicon Preparation |
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| PENG Yao-dong,QIN Pan,RAN Yi,LI Yu-liang,Shang Shu-yong,YIN Yong-xiang. Thermodynamic Qualitative Analysis of Advanced Siemens Process of Polysilicon Preparation[J]. Henan Chemical Industry, 2012, 0(7): 31-34 |
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| Authors: | PENG Yao-dong QIN Pan RAN Yi LI Yu-liang Shang Shu-yong YIN Yong-xiang |
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| Affiliation: | PENG Yao - dong , QIN Pan , RAN Yi , LI Yu - liang , Shang Shu - yong, YIN Yong - xiang ( 1. School of Chemical Engineering , Sichuan University , Chengdu 610065 , China ; 2. Department of Chemistry and Chemical Industry , Yibin University , Yibin 644007 , China) |
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| Abstract: | The thermodynamic analysis of Siemens system are carried out in detail with the method of Gibbs Free Energy theory, and a series of chemical reactions may occur in the system are hackled. The result shows that the main reactions of polysilicon production is decomposition reaction instead of reduc- tion, SiHCl3 splitting generation SICl2（g） ＋ HCl（g） ,and then generate Si and SiCl4 （g）. This not only reasonably used to explain amount of silicon tetrachloride by - product in actual production but also pro- vide scientific evidence for optimizing the reduction technology. |
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| Keywords: | polysilicon Siemens process thermodynamic analysis mechanism of reaction |
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