纤毛式MEMS传感器技术研究

首次综合国内外纤毛式MEMS传感器的研究成果,分别介绍了基于纤毛仿生原理的三维微触觉传感器、三维微力传感器、微声传感器、水流传感器、微几何测量传感器以及矢量水声传感器等。该类型传感器充分地将仿生学和MEMS技术结合起来,具有结构新颖精巧、体积小、功耗低、响应快、温漂小、精度高等优点,为开发具有自主知识产权的新型器件提供了新的思路。

Survey on haircell-based MEMS sensors

A review of investigative production of haircell- based MEMS sensors at home and abroad is presented firstly in this paper. The three-axial micro-tactile sensor three-axial micro-force sensor, micro-acoustic sensor micro-flow sensor, micro-geometry measuring sensor and vector hydrophone based on haircell bionics theory are introduced respectively. The haircell-based MEMS sensors have many advantages such as novel structure, miniaturesize, low power consumption, fast response, small temperature drift as well as high precision by means of integrating bionics theory and MEMS technology. A new train of thought is also provided for research to develop novel devices with self-owned intellectual property rights