用于材料表面强化处理的第三代多功能PⅢ装置

第三代多功能等离子体浸没离子注入（PⅢ）装置的强流脉冲阴极弧金属等离子体源既具有强的镀膜功能，同时也具有强的金属离子注入功能；它的脉冲高压电源能输出大的电流；并可获得高的注入剂量均匀性。该装置既能执行离子注入，又能把离子注入与溅射沉积，镀膜结合在一起，形成多种综合笥表面改性工艺。本文描述了它的主要设计原则、主要部件的特性以及近期的研究工作成果。

The third generation multi-purpose plasma immersion ion implanter for surface modification of materials

The third generation multi-purpose plasma immersion ion implantation (PIII) equipment has been successfully used for research and development of surface modification of biomedical materials, metals and their alloys in the Southwest Jiaotong University. The implanter equipped with intense current, pulsed cathodic arc metal plasma sources which have both strong coating function and gas and metal ion implantation function. Its pulse high voltage power supply can provide big output current. It can acquire very good implantation dose uniformity. The equipment can both perform ion implantation and combine ion implantation with sputtering deposition and coating to form many kinds of synthetic surface modification techniques. The main design principles, features of important components and achievement of research works in recent time have been described in this paper.