Nanostructure analysis of graded oxidation coated glass prepared by APCVD on-line

A solar-control coated glass was prepared using chemical vapor deposition in the A0 zone of an annealing furnace of a float glass manufacturing line. The surface morphology and microstructure of the coated composite film were analyzed by scanning electron microscopy (SEM) and secondary-ion mass spectrometry (SIMS). This shows that the surface of amorphous silicon is smooth, the size of the nodules is about 100-200 nm, the surface roughness is 9.66 nm and the thickness of the layer is 70-78 nm. An oxidization gradient along the thickness of the silicon layer was observed.