| 碳纳米管场发射器件新型阴极的研究 |
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| 引用本文： | 狄云松, 雷威, 张晓兵, 崔云康, 穆辉, 程静,.碳纳米管场发射器件新型阴极的研究[J].电子器件,2006,29(1):62-64. |
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| 作者姓名： | 狄云松 雷威 张晓兵 崔云康 穆辉 程静 |
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| 作者单位： | 东南大学电子工程系,南京,210096;南京师范大学物科院,南京,210097;东南大学电子工程系,南京,210096;华东电子集团,南京,210000 |
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| 基金项目： | 科技部科研项目;广东省博士启动基金;东南大学校科研和教改项目 |
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| 摘 要： | 碳纳米管场发射显示器件（CNT-FFDs）中阴极的制备和表面处理一直是其中的关键环节而备受关注，本文通过光刻技术、丝网印刷技术、表面超声等流程制作带有平整电阻层的发射阴极，并对该阴极进行场发射测试，并通过扫描电镜（SEM）照片分析阴极表面，发现开启电场、发射均匀性及电流稳定性比以前未加处理的阴极有很大程度上的改善。此法适合于大面积的碳纳米管场发射显示的阴极制作。
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| 关 键 词： | 碳纳米管 场发射 阴极 发射性能 |
| 文章编号： | 1005-9490（2006）01-0062-03 |
| 收稿时间： | 2005-08-11 |
| 修稿时间： | 2005-08-11 |
Fabrication Technology of New Type Cathode in CNT-FEDs |
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| DI Yun-song,LEI Wei,ZHANG Xiao-bing,CUI Yun-kang,MU Hui,CHEN Jing.Fabrication Technology of New Type Cathode in CNT-FEDs[J].Journal of Electron Devices,2006,29(1):62-64. |
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| Authors: | DI Yun-song LEI Wei ZHANG Xiao-bing CUI Yun-kang MU Hui CHEN Jing |
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| Affiliation: | 1. Department of Electronics Engineering Southeast University Nanjing 210096,China; 2. School of physics Nanjing Normal University Nanjing 210097,China; 3. Huadong Electronics Group Nanjing 210000,China |
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| Abstract: | Fabrication and surface treatment of the cold cathode is a key process in making carbon nanotube field emission display(CNT-FEDs).photolithography, printing technology and supersonic processing are used to fabricate a new type of cathode. In this cathode, a flat resistance layer is prepared. The surface morphology of the cold cathode is analysed by SEM,and the emission characteristic is also measured. As the results shown, the turn-on field, current stability and emission uniformity of this cathode is improved respectively to compare to the cathode without surface treatment. This type of cathode is very suit to large area CNT-FEDs. |
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| Keywords: | carbon nanotube field emission cathode emission character |
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