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微细电解加工的过程检测及精度控制
引用本文:张朝阳,毛卫平,陈飞,王耀民.微细电解加工的过程检测及精度控制[J].中国机械工程,2010(6).
作者姓名:张朝阳  毛卫平  陈飞  王耀民
作者单位:江苏大学;
基金项目:国家自然科学基金资助项目(50975127); 高等学校博士学科点专项科研基金资助项目(20093227120006); 中国博士后科学基金资助项目(20080431072); 江苏省博士后科研基金资助项目(0801004C); 高等学校高级人才启动基金资助项目(07JDG069)
摘    要:超短脉冲微细电解加工时,极间加工间隙很小,加工过程的稳定性是影响加工精度的重要因素。在所建立的加工控制系统中,采用两步短路对刀法精确定位电极初始间隙,利用霍尔电流传感器实时检测平均加工电流,动态控制电极的进给运动速度,从而保持不同加工条件下稳定加工的最小加工间隙。进行了微细结构的电解加工试验,通过检测加工过程的状态,保证了加工的稳定性,实现了线宽只有25μm的微细结构加工。

关 键 词:微细电解加工  控制系统  过程检测  极间间隙  

Investigation on Monitoring and Control of Electrochemical Micro-machining Process
Zhang Zhaoyang Mao Weiping Chen Fei Wang Yaomin Jiangsu University,Zhenjiang,Jiangsu.Investigation on Monitoring and Control of Electrochemical Micro-machining Process[J].China Mechanical Engineering,2010(6).
Authors:Zhang Zhaoyang Mao Weiping Chen Fei Wang Yaomin Jiangsu University  Zhenjiang  Jiangsu
Affiliation:Zhang Zhaoyang Mao Weiping Chen Fei Wang Yaomin Jiangsu University,Zhenjiang,Jiangsu,212013
Abstract:While an ultra-short pulse power supply was applied into the electrochemical micro-machining,the stabilization of machining process is an important factor affecting the machining precision due to the very small inter-electrode gap.In the machining control system,a two-step location method was proposed to exectly define the beginning iner-electrode gap.A Hall current sensor was used to detect the average current signal in real-time,and the feed speed was controlled dynamically.Therefor the smallest machining...
Keywords:electrochemical micro-machining  control system  process monitoring  inter-electrode gap  
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