| 耐高温多晶硅应变计 |
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| 引用本文： | 孙凤玲,田雷,孙学智,王善慈.耐高温多晶硅应变计[J].传感器与微系统,2001,20(3):21-23. |
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| 作者姓名： | 孙凤玲 田雷 孙学智 王善慈 |
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| 作者单位： | 信息产业部电子第四十九研究所, |
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| 摘 要： | 介绍了一种适用于特殊环境进行高温测量的多晶硅应变计的原理、设计、制作工艺及粘贴方法。它的特点是耐高温 (可用在温度达 2 5 0℃的环境中 )、体积小、安装方便。该种应变计已用于检测电站锅炉焊缝的牢固程度 ,在实际应用中性能较好
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| 关 键 词： | 多晶硅 应变计 粘接 |
| 文章编号： | 1000-9787(2001)03-0021-03 |
| 修稿时间： | 2000年10月26 |
Temperature-resistant polysilicon strain gauge |
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| SUN Feng-ling,TIAN Lei,SUN Xue-zhi,WANG Shan-ci.Temperature-resistant polysilicon strain gauge[J].Transducer and Microsystem Technology,2001,20(3):21-23. |
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| Authors: | SUN Feng-ling TIAN Lei SUN Xue-zhi WANG Shan-ci |
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| Abstract: | Polysilicon strain gauge being applied to special environment is introduced,including principle,design,manufacture technology and bonding method.It features in resistance to high temperature up to 250?℃, small volume and expedient installation.The strain gauge has been used to inspect slot weld of boiler in power station, the performance is better in practical application. |
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| Keywords: | polysilicon strain gage bonding |
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