| 长线阵12000元CCD密封技术研究 |
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| 引用本文： | 钟四成,陈于伟,程顺昌,王艳.长线阵12000元CCD密封技术研究[J].半导体光电,2010,31(5). |
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| 作者姓名： | 钟四成 陈于伟 程顺昌 王艳 |
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| 作者单位： | 重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060;重庆光电技术研究所,重庆,400060 |
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| 摘 要： | 针对长线阵12000元CCD封装密封技术进行了探讨,比较了目前封装中的几种主流封盖技术的特点,表明采用胶封技术在目前对CCD来说是一种合理选择.针对紫外胶A,进行了胶封工艺的开发.对氟油粗检漏技术进行了分析,最终采用了一种新的氦气加压常温气泡栓漏法对器件的密封效果进行考核检测.
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| 关 键 词： | 长线阵CCD 封盖技术 氟油粗检漏 氦气加压常温气泡 密封 |
Study on Sealing Technology of 12000-pixei Linear Array CCD |
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| ZHONG Sicheng,CHEN Yuwei,CHENG Shunchang,WANG Yan.Study on Sealing Technology of 12000-pixei Linear Array CCD[J].Semiconductor Optoelectronics,2010,31(5). |
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| Authors: | ZHONG Sicheng CHEN Yuwei CHENG Shunchang WANG Yan |
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| Affiliation: | ZHONG Sicheng,CHEN Yuwei,CEHNG Shunchang,WANG Yan (Chongqing Optoelectronics Research Institute,Chongqing 400060,CHN) |
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| Abstract: | The sealing technology based on 12 000-pixel linear array CCD was studied.Comparisons of several main encapsulation technologies indicate that using adhesive is a reasonable choice for CCD sealing.The adhesive-sealing process was developed based on UV adhesive A.The leak detection method of fluorocarbon oil used in GJB standard was studied,and a new method of vapor detection at room temperature was adopted to test the hermeticity of the sealed device. |
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| Keywords: | linear array CCD encapsulation technology leak detection of fluorocarbon oil vapor detection at room temperature hermeticity |
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