| 砷化镓开管锌扩散及其扩散模型 |
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| 引用本文： | 刘文杰,陈海新. 砷化镓开管锌扩散及其扩散模型[J]. 河北工业大学学报, 1990, 0(4) |
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| 作者姓名： | 刘文杰 陈海新 |
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| 作者单位： | 河北工学院电气工程系，秦皇岛市煤气公司 |
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| 摘 要： | 本文利用特殊设计的石墨舟,作了GaAs开管Zn扩散实验,获得了质量较好的扩散片,取得了一系列实验结果,从而确定出最佳扩散条件.对不同扩散条件下的扩散片进行了SIMS测试,得到了Zn浓度反常分布曲线,提出一种新的扩散模型,对反常分布曲线给予了合理的解释.
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| 关 键 词： | 开管扩散 锌浓度 扩散模型 二次离子质谱(SIMS) 最佳扩散条件 扩散片 反常分布 石墨舟 |
Zn-diffusion in GaAs Open Tube and Its Diffusion Model |
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| Liu Wenjie Chen Haixin. Zn-diffusion in GaAs Open Tube and Its Diffusion Model[J]. Journal of Hebei University of Technology, 1990, 0(4) |
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| Authors: | Liu Wenjie Chen Haixin |
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| Affiliation: | Liu Wenjie Chen Haixin |
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| Abstract: | By means of the specially designed graphite boat,the Zn-diffusion experiment. in GaAs open tube has been carried out,and a series of experimental results and the diffusion chips with good guality were obtained.Thus,the optimum conditions of diffusion were also determined.An unusual distributiori curve of Zn concentration,being gained through the SIMS measurement of diffusion chips under different diffusion conditions has been obtained and proposed a new diffusion model to give a reasonable explanation for the unusual distrib- ution curve. |
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| Keywords: | Open tdde diffusion Zn-Concetration Diffusion model SIMS Optimal diffision condition Diffusion chip Unusual distribution Graphite boat |
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