Monolithic Integration of InP HBTs and Uni-Traveling-Carrier Photodiodes Using Nonselective Regrowth

This paper describes the monolithic integration of InP HBTs and uni-traveling-carrier photodiodes (UTC-PDs) by nonselective regrowth. HBTs are fabricated from nonselectively regrown device layers and UTC-PD subcollector layers, which are grown first on a 3-in InP substrate. This makes it possible to optimize the layer design for the HBTs and UTC-PDs independently and minimize the interconnection between them. The fabricated HBTs have a collector thickness of 200 nm, and they show an f_t of 260 GHz and an f_max of 320 GHz at a collector current density of 2.5 mA/mum². The standard deviations of the f_t and f_max across the wafer are 1.7% and 4.4%, respectively. The length of the interconnection between the HBTs and UTC-PDs can be made as small as 10 mum without any degradation of the regrown-HBT performance. The UTC-PDs fabricated on the same wafer exhibit a 3-dB bandwidth of 100 GHz and an output voltage of 1.0 V. There is no drawback in the performance of either device, as compared with that of discrete devices. We also demonstrate 100-GHz optical-input divide-by-two optoelectronic integrated circuits (OEICs) consisting of InP HBTs and a UTC-PD using this technique. These results indicate that the nonselective regrowth is promising for application toward over 100-Gb/s OEICs.