Department of Mechanical & Industrial Engineering University of Illinois at Urbana Champaign, 140 MEB, 1206 W. Green Street, Urbana, IL 61820, USA
Abstract:
We present uniaxial tensile test results for 30–50 nm thick freestanding aluminum films. Young’s modulus and ductility were found to decrease monotonically with grain size. Reverse Hall–Petch behavior was observed with no appreciable room temperature creep. Non-linear elasticity with small irreversible deformation was observed for 50 nm thick specimens.