Characterization and applications of a new tabletop confocal micro X-ray fluorescence setup |
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Authors: | Xiaoyan Lin Zhihong Wang Tianxi Sun Qiuli Pan Xunliang Ding |
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Affiliation: | a Key Laboratory of Beam Technology and Material Modification of Minister of Education, Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing 100875, China b Beijing Radiation Center, Beijing 100875, China |
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Abstract: | A tabletop confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) setup was designed, based on polycapillary X-ray optics and a micro-focus X-ray source. This confocal setup consists of a polycapillary full lens to focus the incident beam and a polycapillary half lens to collect the X-ray fluorescence. The confocal volume was proved to be ellipsoidal. The full-width at half maximum (FWHM) of the confocal volume in three directions were measured with a “knife edge” scan method to obtain the spatial resolution of the confocal setup. The structure of multilayer samples was studied using the depth scan technique. |
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Keywords: | 07 85 &minus m 42 79 &minus e |
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