| 大口径离轴碳化硅非球面反射镜加工与检测技术研究 |
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| 引用本文： | 王孝坤. 大口径离轴碳化硅非球面反射镜加工与检测技术研究[J]. 激光与光电子学进展, 2012, 0(1): 71-75 |
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| 作者姓名： | 王孝坤 |
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| 作者单位： | 中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室 |
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| 基金项目： | 国家863计划(O8663NJ090);国家自然科学基金重点项目(61036015)资助课题 |
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| 摘 要： | 分析了碳化硅作为空间反射镜材料的各种优点,研究了加工和检测离轴碳化硅非球面反射镜的各项关键技术。利用自行开发的非球面加工中心FSGJ-2对离轴碳化硅非球面进行了研磨、抛光和轮廓测量,分析了计算全息补偿检测离轴非球面的基本原理,并专门设计研制了计算全息衍射检测装置,对大口径离轴非球面反射镜进行了零位补偿干涉测量。结合工程实例对一口径为468mm×296mm的离轴碳化硅非球面进行了超精加工与检测,最终面形误差峰谷(PV)值为0.148λ,均方根(RMS)值为0.017λ(λ=632.8nm),达到了良好的效果。
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| 关 键 词： | 光学设计 碳化硅 非球面反射镜 离轴非球面 计算机控制光学表面成形 计算全息 |
Fabrication and Testing of Large Aperture Off-Axis SiC Aspheric Mirror |
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| Wang Xiaokun. Fabrication and Testing of Large Aperture Off-Axis SiC Aspheric Mirror[J]. Laser & Optoelectronics Progress, 2012, 0(1): 71-75 |
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| Authors: | Wang Xiaokun |
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| Affiliation: | Wang Xiaokun(Key Laboratory of Optical System Advanced Manufacturing Technology,Changchun Institute of Optics, Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun,Jilin 130033,China) |
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| Abstract: | The advantage of manufacturing space mirror by SiC material is analyzed,and the key technologies of fabricating and testing SiC aspheric mirror are researched.The off-axis SiC aspheric surface is ground and polished by the FSGJ-2 numerical control machine,and the contour is measured by the profilometer of FSGJ-2.For the purpose of testing aspheric mirror by null-compensation,a computer-generated holographic instrument is specifically designed and developed.Finally,an example for fabricating and measuring an off-axis aspheric mirror with the aperture of 468 mm×296 mm is given.The peak-to-valley(PV) and root mean square(RMS) values of the surface error are 0.148λ and 0.017λ(λ is 632.8 nm),respectively.It could meet the requirements of the optical design. |
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| Keywords: | optical design SiC aspheric mirror off-axis asphere computer control optical surface computer-generated holograph |
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