| 智能传感器技术发展综述 |
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| 引用本文： | 殷毅. 智能传感器技术发展综述[J]. 微电子学, 2018, 48(4): 504-507, 519 |
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| 作者姓名： | 殷毅 |
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| 作者单位： | 中国电子科技集团有限公司, 北京 100864 |
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| 摘 要： | 从智能传感器的概念和架构出发,研究了MEMS、CMOS、光谱学等主流技术智能传感器的基本发展情况。探讨了智能传感器的实现途径。列举了军用智能传感器的重点应用领域和技术。结合国内实际情况,提出关于智能传感器的发展建议。
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| 关 键 词： | 智能传感网 MEMS CMOS 光谱学 |
| 收稿时间： | 2018-04-09 |
An Overview of Smart Sensors Technology Developing |
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| YIN Yi. An Overview of Smart Sensors Technology Developing[J]. Microelectronics, 2018, 48(4): 504-507, 519 |
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| Authors: | YIN Yi |
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| Affiliation: | China Electronics Technology Group Co., Ltd., Beijing 100864, P. R. China |
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| Abstract: | The concepts and architectures of smart sensors technology were surveyed, and the trends of development of the smart sensors made by the processes of MEMS, CMOS and optical spectroscopy were investigated. The technology roadmap of smart sensor was discussed. The critical technologies of smart sensors in the realm of military important applications were pointed out. Having jointed the domestic reality of smart sensors technology, the optimized strategies were put forward for the developing efforts. |
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| Keywords: | smart sensor web MEMS CMOS optical spectroscopy |
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