| 非平衡磁控溅射类金刚石薄膜的特性 |
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| 引用本文： | 徐均琪,杭凌侠,惠迎雪.非平衡磁控溅射类金刚石薄膜的特性[J].真空科学与技术学报,2005,25(2):134-137,141. |
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| 作者姓名： | 徐均琪 杭凌侠 惠迎雪 |
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| 作者单位： | 西安工业学院光电工程学院,西安,710032 |
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| 摘 要： | 非平衡磁控溅射(UBMS)结合了普通磁控溅射(MS)和离子束辅助沉积的优势,易于实现离子镀,近年来得到了广泛的应用.采用该技术制备的类金刚石薄膜(DLC)具有许多独特的性质.本文研究了非平衡磁控溅射技术制备DLC薄膜的光学、机械,电学和化学性能.研究表明,非平衡磁控溅射制备的DLC膜具有较宽的光谱透明区,且表面光滑、摩擦系数小、耐磨损、抗化学腐蚀,同时具有较高的电阻率和良好的稳定性.
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| 关 键 词： | 类金刚石膜 非平衡磁控溅射 磁控溅射 特性 |
| 文章编号： | 1672-7126(2005)02-0134-04 |
Properties of Diamond Like Carbon Films Prepared by Unbalanced Magnetron Sputtering |
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| Xu Junqi,Hang Lingxia,Hui Yingxue.Properties of Diamond Like Carbon Films Prepared by Unbalanced Magnetron Sputtering[J].JOurnal of Vacuum Science and Technology,2005,25(2):134-137,141. |
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| Authors: | Xu Junqi Hang Lingxia Hui Yingxue |
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| Abstract: | Hydrogen free,diamond-like carbon (DLC) film was grown by a newly developed technique called unbalanced magnetron sputtering(UBMS),a technique combining conventional magnetron sputtering and ion-assisted deposition.Some of the physical properties of the film were tentatively studied.The preliminary results show that the DLC film,grown by UBMS,displays quite a few favorable features,including smooth surface,low friction coefficient,high wear-and erosion-resistance,wide optical range of transparency,high resistivity,and chemical stability. |
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| Keywords: | Diamond-like carbon films (DLC) Unbalanced magnetron sputtering (UBMS) Magnetron sputtering (MS) Properties |
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