电涡流位移传感器在FY-3卫星G型辐射制冷器上的应用

电涡流位移传感器是利用电涡流原理来实现对位移的非接触式精密测量的一种微型器件。FY-3气象卫星有效栽荷中分辨率光谱成像仪（MERSI）采用大冷量G型辐射制冷器冷却碲镉汞（HgCdTe）红外探测器，即长波红外和短波红外线列探测器，分别安装在辐射制冷器二级和一级上。G型辐射制冷器的后光路由于温度的降低和残余应力的存在会发生一定的不规律变形，必须测量此形变，确定低温下后光路的位置，便于对后光路进行低温红外光学校正。电涡流位移传感器是在真空和低温条件下测量此形变的合理选择。

Eddy Current Displacement Sensor Applied to G-Radiant Cooler for FY-3 Meteorological Satellite

Eddy current displacement sensor is a type of microdrivers using the theory of eddy current to noncontact measuring the displacement precisely. G-radiant cooler has been used to cool the infrared detectors of the Medium Resolution Spectral Imager （MERSI） for the FY-3 Meteorological Satellite. The long and short wavelength HgCdTe infrared detectors are installed on cold stage and intermediate stage respectively. The optical paths of G- radiant cooler will produce irregular deformation because of the low temperature and the residual stress. The study has measured the deformation and the place of the optical paths at low temperature in order to achieve the cryogenic optical adjustment. Eddy current displacement sensor is a reasonable choice for measuring the deformation in the low temperature and vacuum condition.