| 一种实用的单晶炉提拉速度控制系统 |
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| 引用本文： | 袁南儿,刘勤贤. 一种实用的单晶炉提拉速度控制系统[J]. 电气传动, 2001, 31(4): 46-48 |
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| 作者姓名： | 袁南儿 刘勤贤 |
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| 作者单位： | 浙江工业大学 |
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| 摘 要： | 文章提出了一种实用的单晶炉提拉速度控制系统。该系统结构简单、造价低。实测表明，系统的性能满足生产要求，现已获得成功应用并投入批量生产。
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| 关 键 词： | 单晶炉 提拉速度 速度控制系统 半导体材料 半导体器件 |
A Practical Speed Control System for Single-crystal Furnace Lifting Mechanism |
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| Yuan Naner Liu Qinxian. A Practical Speed Control System for Single-crystal Furnace Lifting Mechanism[J]. Electric Drive, 2001, 31(4): 46-48 |
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| Authors: | Yuan Naner Liu Qinxian |
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| Affiliation: | Yuan Naner Liu Qinxian |
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| Abstract: | This paper proposes a practical speed control system for single crystal furnace lifting mechanism.The system has simple construction and lower final cost.The experimental performance shows that the system can meet the demand of the practical use.It has been applied in production and manufactured in series. |
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| Keywords: | single crystal furnace lifting speed speed control system |
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