类金刚石薄膜的离子注氮研究

以25～35kV的高能离子束将离子化的双原子分子N+2注入非晶态碳膜,硬度可提高10GPa量级.分析研究表明:离子注氮并没有改变碳膜的非晶态结构,但所有拉曼结构参数发生变化,且碳、氮结合能峰位发生化学位移;显然注入的氮和碳形成化学键,并可能形成新相. 结论:类金刚石薄膜离子注氮可合成氮化的类金刚石,改变化学结构,提高机械性能.

Study on Ionized Nitrogen Implantation of Diamondlike Carbon Film

The ionized nitrogen of double-atom molecules were implanted with high-energy ion beam of (25-35) kilovolts into amorphous carbon films which were previously deposited on steel substrate by ion beam sputtering at an graphite target with low-energy between 250-500 eV. Nano-indentation results show that there is an increase in hardness from (20-30) GPa up to (27-42) GPa after ion implantation. As revealed by Raman spectroscopy, the amorphous structure of the films is unchanged after ion implantation, while those Roman parameters sensitive to bonding structure are affected, suggesting the formation of chemical bonding between nitrogen and carbon atoms. Significant chemical shift on both Cls and Nls core level peaks was found by using XPS analysis, which strongly suggests the formation of new phase after ion implantation. It can be concluded that implanting nitrogen leads to nitrogenated diamondlike carbon, changed chemical stucture and enhanced mechanical properties.