Indentation mechanics and its application to thin film characterization |
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Authors: | E. Le Bourhis |
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Affiliation: | Université de Poitiers, Laboratoire de Métallurgie Physique, UMR 6630 CNRS, SP2MI-Téléport 2-Bd M&P Curie, B.P. 30179, 86962 Futuroscope-Chasseneuil Cedex, France |
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Abstract: | Instrumented indentation mechanics and its applications to thin film characterization are described and discussed. Instrumented nanoindentation has become an outstanding tool for characterizing coatings and treated surfaces. It is routinely used in industry and university allowing for determining the mechanical performance of coated and treated pieces, that is of primary importance for keeping new surface functionality in time. The paper reviews important procedures and concepts that have proved to be very useful to analyse the contact response (elastic unloading, indentation strains and stresses, composite response of coated pieces). Examples are used to illustrate the very wide range of studies that can be carried out. |
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Keywords: | Nanoindentation Strain Stress Thin Film Hardness Elastic modulus |
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