| 基于数字微镜器件的共焦显微镜的设计与实验 |
| |
| 引用本文： | 张运波,侯文玫,句爱松.基于数字微镜器件的共焦显微镜的设计与实验[J].仪器仪表学报,2011,32(9). |
| |
| 作者姓名： | 张运波 侯文玫 句爱松 |
| |
| 作者单位： | 上海理工大学光电信息与计算机工程学院 上海 200093 |
| |
| 基金项目： | 国家自然基金(No.51075280); 上海市教委重点学科第五期(No.J50505); 上海市研究生创新基金(No.JWCXSL1001)资助项目 |
| |
| 摘 要： | 单点式共焦显微镜由于扫描速度低,光能利用率不高逐渐被多点并行的扫描方式代替.现有的并行扫描方式同样存在一些缺点,限制了测量精度的进一步提高.本文研究了基于数字微镜器件(digital micromirror device,DMD)的多路并行共焦显微镜.利用计算机程序控制DMD芯片上微镜的偏转状态,从而对光源进行调制,形成多路光束,其作用相当于可以控制的虚拟针孔阵列.设计了基于DMD的共焦检测光路,采用分光片的方法解决了由于分光棱镜内表面反射造成的重像干扰问题.对所搭建的光路进行了深度响应曲线测试实验,并且建立了基于DMD的共焦显微镜样机.样机的测量实验结果表明:基于DMD的共焦显微镜不仅具有较高的分辨率,并且具有扫描速度快、测量范围大的优点.
|
| 关 键 词： | 共焦检测 数字微镜器件 并行扫描 重像干扰 分光片 |
Design and experiment of digital micromirror device based confocal microscope |
| |
| Zhang Yunbo,Hou Wenmei,Ju Aisong.Design and experiment of digital micromirror device based confocal microscope[J].Chinese Journal of Scientific Instrument,2011,32(9). |
| |
| Authors: | Zhang Yunbo Hou Wenmei Ju Aisong |
| |
| Affiliation: | Zhang Yunbo,Hou Wenmei,Ju Aisong(School of Optical-Electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China) |
| |
| Abstract: | Due to its low scanning speed and poor efficiency of light energy utilization,single-point scanning confocal microscope is gradually replaced by multi-point parallel scanning method.However,there are still some disadvantages in existing parallel scanning method,which limits its further accuracy improvement.This article studies a multi-beam parallel scanning method based on Digital Micromirror Device(DMD).The micromirror is controlled by a computer program and the light source is modulated to form multi-chan... |
| |
| Keywords: | confocal inspection digital micromirror device parallel scanning double imaging disturbance beamsplitter plate |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
