微细电化学加工技术

开展了微细电化学加工技术的试验研究工作，内容包括微细电铸和微细电解加工．讨论了微细电化学加工的工艺特点和主要技术步骤．针对若干典型微结构，提出了相应的微细电化学加工方法和技术方案，采取了纳秒脉宽脉冲电流、电化学微铣削等手段，结合若干实例进行了加工试验，例如：微缝电解加工、微轴电解加工、微针尖电解加工及微齿轮模具模芯电铸成型等，获得了很好的试验结果．提出的加工方法在金属零件微制造方面有着重要的应用前景．

Micro Electrochemical Fabrication

This paper is focused on developing micro electrochemical fabrication processes, including micro electroforming and micro electrochemical machining. The principle, advantage and some important issues of micro electrochemical fabrication processes are discussed. For some typical microstructures, methods and technical routes were suggested in micro electrochemical fabrication by employing nanosecond-width pulse current, and electrochemical micromachining, etc. Several examples of micro electrochemical fabrication are introduced, such as micro beaning, micro pins and tips, micro gear mould, etc. The presented method has a potential application in the micro part fabrication.