| 热处理温度对NdFeB稀土永磁薄膜磁性能的影响 |
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| 引用本文： | 张勤勇,蒋洪川,张万里. 热处理温度对NdFeB稀土永磁薄膜磁性能的影响[J]. 磁性材料及器件, 2004, 35(4): 18-20 |
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| 作者姓名： | 张勤勇 蒋洪川 张万里 |
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| 作者单位： | 西华大学,材料系,四川成都,610039;电子科技大学,微电子与固体电子学院,四川成都,610054;电子科技大学,微电子与固体电子学院,四川成都,610054 |
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| 摘 要： | 采用直流磁控溅射法制备NdFeB稀土永磁薄膜,并对其进行了退火热处理,主要考察了热处理温度对薄膜磁性能的影响.结果表明,热处理后的薄膜磁性能显著提高,随热处理温度的升高,薄膜的磁性能逐渐升高,但当温度上升到700℃时,薄膜的磁性能迅速下降.在热处理温度为650℃时,薄膜的最佳磁性能为,矫顽力Hc=650kA/m,剩余磁感应强度Br=0.72T,最大磁能积(BH)max=74kJ/m3.
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| 关 键 词： | 直流磁控溅射 NdFeB永磁薄膜 退火 磁性能 |
| 文章编号： | 1001-3830(2004)04-0018-03 |
| 修稿时间： | 2003-12-23 |
The Influences of Annealing Temperature on the Magnetic Properties of NdFeB Film |
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| ZHANG Qin-yong,,JIANG Hong-chuan,ZHANG Wan-li . School of Materials,Western China University,Chengdu ,China, . School of Microelectronics and Solid Electronics,University of Electronic Science and Technology of China,Chengdu ,China. The Influences of Annealing Temperature on the Magnetic Properties of NdFeB Film[J]. Journal of Magnetic Materials and Devices, 2004, 35(4): 18-20 |
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| Authors: | ZHANG Qin-yong JIANG Hong-chuan ZHANG Wan-li . School of Materials Western China University Chengdu China . School of Microelectronics Solid Electronics University of Electronic Science Technology of China Chengdu China |
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| Affiliation: | ZHANG Qin-yong1,2,JIANG Hong-chuan2,ZHANG Wan-li2 1. School of Materials,Western China University,Chengdu 610039,China, 2. School of Microelectronics and Solid Electronics,University of Electronic Science and Technology of China,Chengdu 610054,China |
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| Abstract: | |
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| Keywords: | DC magnetron sputtering NdFeB permanent magnetic films annealing magnetic properties |
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