A grounded coplanar waveguide technique for microwave measurement of complex permittivity and permeability

We present a method for extracting the complex permittivity and permeability of dielectric/magnetic thin films in a grounded coplanar waveguide configuration. The technique is applicable for extraction of these material parameters for lossy and lossless materials over a broad frequency range with high accuracy. For validation, we extracted complex permittivity and permeability, using the scattering parameters obtained from the full-wave electromagnetic simulation for two test cases over a frequency range of 5 to 15 GHz. Accuracy for both dielectric as well as magnetic materials is within 2% error.